IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Paper
Numerical Study on Photo-thermal Driven Bi-stable Micro Switch
Yosinori Takayama, Yasuhiro Koshimoto
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Keywords: thermo-sensitive material, MEMS, micro switch, laser heating
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2006 Volume 126 Issue 12 Pages 1245-1248

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Abstract
The dynamics of the micro magnetic switch driven by optical heating is simulated. By using Three Dimensional Finite Difference Time Domain (FDTD) program newly developed and FEM, a small armature composed by thermo-sensitive magnetic film can operate faster than 0.05ms by heating power of 7mW or less, Bi-stable operation is also confirmed.
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© 2006 by the Institute of Electrical Engineers of Japan
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