High Resolution Three-dimensional Space Charge Distribution Measurement System

Abstract

The pulsed electroacoustic (PEA) method has already been widely used to measure the space charge distribution in solid dielectric materials. Since conventional PEA systems can measure the distributions only along the thickness direction, we developed a new system with a capability of doing three-dimensional measurements. However, the system did not have a good lateral resolution. Therefore, in this research, we designed a new nonspherical acoustic lens. As a result, the resolution has been improved both in the thickness direction and the lateral direction.