IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Paper
Measurement of Adhesion Strength of DLC Film Prepared by Utilizing Plasma-Based Ion Implantation
Yoshihiro OkaMitsuyasu Yatsuzuka
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2006 Volume 126 Issue 8 Pages 801-806

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Abstract
High-adhesion diamond-like carbon (DLC) film was prepared by a hybrid process of plasma-based ion implantation and deposition using superimposed RF and high-voltage pulses. The adhesion strength of DLC film on a stainless steel (SUS304) was enhanced by the carbon ion implantation to the substrate. Furthermore, ion implantation of mixed carbon and silicon led to considerable enhancement of adhesion strength above the resin glue strength. The adhesion strength of DLC film on the aluminum alloy (A-5052) was improved above the resin glue strength only by the carbon ion implantation to the substrate.
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© 2006 by the Institute of Electrical Engineers of Japan
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