電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Special Issue Review
Preparation of Thick Magnet Films by the Aerosol Deposition Method
Satoshi Sugimoto
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2007 年 127 巻 1 号 p. 27-28

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抄録
The aerosol deposition method (ADM) is effective for the preparation of thick films with high deposition rate. We applied this method to fabricate NiZn ferrite or Sm-Fe-N films, which are used for microwave absorbers or permanent magnets, respectively. In this article, the magnetic properties of Sm-Fe-N thick films fabricated by the ADM are introduced and the possibility of the ADM for the fabrication process with high deposition rate is discussed.
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© 2007 by the Institute of Electrical Engineers of Japan
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