抄録
Application of atmospheric-pressure non-thermal plasma tends to expand more widely into various fields. The recent trend of non-thermal plasma source is the scaling-up to large dimensions with dense concentrations of reactive particles. In dielectric barrier discharge the requirement for the dense plasma is the increase of the microdischarge occurrences. For the generation of large-scaled dense plasma, the capacity-coupled multidischarge (CCMD) is advantageous. The discharge gaps in the CCMD consist of a common electrode and a number of compact electrodes which are directly coupled with small capacitors for extinction of the discharge. This article introduces the recent trends on large-area, dense, atmospheric-pressure plasma source.
