エアロゾルデポジッション法によるPLZT薄膜を用いた電気光学光変調器の検討

抄録

We investigated a fabrication process and optical properties of electro-optic (EO) light modulators with Fabry-Perot structure, which consisted of PLZT [(Pb_0.91, La_0.09)(Zr_0.65, Ti_0.35)O₃] thick films by aerosol deposition method. A supernatant elimination process for small size PLZT powder with diameter of 0.125-0.175 μm was effective in order to obtain a transparent film. In the fabricated Fabry-Perot type EO light modulator with a ITO (Indium Tin Oxide))/PLZT/ITO defect layer, a wavelength of resonant localized mode was shifted about 1.0 nm from 788 nm by applying an electric field of +400 kV/cm in reflectance mode, and consequently the reflectance difference of 7.2 % was observed. The Fabry-Perot type EO light modulator had the advantage of contrast of light in the reflection mode.