電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
特集論文
微細ガス流・液体を用いた大気圧非平衡マイクロプラズマ
石井 彰三白井 直機井深 真治金丸 誠菊地 淳
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2010 年 130 巻 10 号 p. 899-906

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We developed noble schemes to generate atmospheric-pressure microplasmas, in which the mass of initial materials such as gases or liquids is limited to a small amount. A miniature gas flow through a nozzle electrode was used to generate direct current glow or corona microdischarges with a metal or an electrolyte cathode. High-power microplasmas were operated by fast pulsed voltages. Pulsed microplasmas were created using a droplet or a filament of aqueous solution of ethanol.

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