Abstract
Compact and coherent light sources are key components for development of terahertz frequency range in which various applications are expected. Recent progress in room-temperature terahertz oscillators using resonant tunneling diodes are shown here. Fundamental oscillation up to 1.04 THz has been achieved with a structure having short transit time of electrons. This is the first oscillation above 1 THz in room-temperature electronic single oscillators. Structures for high output power, frequency change with bias voltage, and spectral linewidth are also described.