Recent Trends of Traditional Optical Emission Spectroscopic Measurement of Non-Equilibrium Plasmas

—Atmospheric-Pressure Ar Plasma and Low-Pressure N₂ Plasma—

Abstract

Recent trends of optical emission spectroscopic measurement of atmospheric pressure plasmas are reviewed for the determination of electron temperature and density. Some methods to estimate the electron temperature and density are reviewed, based upon the quantitative description of the excitation kinetics in the non-equilibrium plasmas. Line intensity measurement methods are reviewed for atmospheric-pressure Ar plasma and low-pressure N₂ plasma.