抄録
Characteristics of planar dielectric barrier discharges (DBDs) with a non-through micro-hole array structure were studied for different hole structures. The ignition voltage of the DBDs decreased with increasing hole depth and diameter. These results were consistently explained using an equivalent electric circuit model of planar DBD electrodes with a non-through hole. The optical emission intensity increased roughly exponentially with increasing hole depth at a given applied voltage and also increased with different two slopes with increasing an input applied voltage for the same hole shape. Using the optimized hole structures, it was demonstrated that the uniform DBDs over all of 10×10 micro-holes were obtained at a relatively low applied voltage of Va=5 kV.
