閉磁路RF平面スパイラルインダクタの漏れ磁束を考慮した一軸磁気異方性薄膜の磁気モーメント制御

抄録

A relation between high-frequency properties and an angle θ of anisotropy magnetic field in CoFeSiO/SiO₂ multilayer nano-granular magnetic film for an RF planar spiral inductor was described in order to suppress a leakage flux. A ferromagnetic resonance (FMR) frequency f_r and an FMR half-width Δf_r were very little dependence on θ. The FMR frequency f_r and the FMR half-width Δf_r were estimated about 2.5 and 0.3 [GHz]. On the other hand, the static permeability μ_s was dependent on approximately sin²θ. The static permeability in hard axis μ_h was estimated about 250. So then, the CoFeSiO/SiO₂ multilayer nano-granular magnetic film has superior high frequency character for the inductor.