抄録
The topcoat thickness of thermal barrier coating (TBC) samples was measured using terahertz (THz) waves. The index of refraction of yttria stabilized zirconia (YSZ), which is the topcoat material, is necessary to obtain the topcoat thickness from time domain reflectometry. Time domain THz spectroscopy was applied to YSZ samples, and the index of refraction was measured to be 4.8 in the frequency region 0.1-1.2 THz. The topcoat thickness of 6 different TBC samples, which varied from 300 to 600 μm, was measured using THz waves. The results were in agreement with microscope observation results to within measurement error. In addition, the topcoat thickness profile of a turbine blade sample was measured with 2.4 μm resolution. The profile showed a standard deviation of 4 μm, which reflects the actual variation in the topcoat thickness. The results showed that THz waves are effective for high resolution measurement of the topcoat thickness.
