電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
研究開発レター
光化学堆積SnO2薄膜を用いた携帯式水素検出器の試作
オ ドンボリル森口 幸久市村 正也
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2013 年 133 巻 1 号 p. 28-29

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A highly sensitive room temperature hydrogen sensor based on Fe-doped and undoped SnO2 films were fabricated by the photochemical deposition. For deposition of doped and undoped SnO2 films, a small amount of an aqueous solution was dropped on a glass substrate and irradiated by UV light. Pd was doped to the surface of the SnO2 thin films by a photochemical technique, and then the samples were annealed. Response of a portable-type hydrogen detector consisting of the sample and a pocket tester was investigated. The Fe-doped sample showed higher sensitivity compared with the undoped sample.
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