IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Paper
Application of Capillary Discharge Technique for Deposition of Diamond-Like Carbon Thin Films (2nd Report)
—Effect of Discharge Tube Material on Deposition using Capillary Discharge Method—
Kiyotoshi FujiiEtsuo FujiwaraMasayoshi ShimizuShozo Inoue
Author information
JOURNAL FREE ACCESS

2013 Volume 133 Issue 5 Pages 293-299

Details
Abstract
We have been studying the Pulsed Plasma Deposition (PPD) technique for applying diamond-like carbon film deposition. This technique is one of the applications of the capillary discharge, and the deposition process is based on an ablation. In this study, we have found that the discharge tube material affect the discharge condition and the optical emission spectrum of the plume. We have also succeeded to increase the discharge current using a earth attached to the capillary tube. This earth has been effective for stabilizing the discharge. It can be concluded that the electrical properties (dielectric constant and conductivity) and physical property (melting point) of the discharge tube affect the capillary discharge.
Content from these authors
© 2013 by the Institute of Electrical Engineers of Japan
Previous article Next article
feedback
Top