We have developed a very sensitive thin film sensor using a transmission line. The sensor element consists of a coplanar line fabricated from a ceramic substrate and amorphous-CoNbZr film (4μm in thickness). The ceramic substrate with high permittivity enhances the phase change of the carrier, phase change around 7000 degree/Oe being achieved. A small phase change was detected using a Dual Mixer Time Difference (DMTD) method when a weak magnetic field are applied. We applied the sensor for magnetocardiogram (MCG) measurement using the phase detection technique. We succeeded in measuring the MCG signals in multi point, including a typical QRS wave and T wave, and this signals were found to roughly agree with already reported MCG data by SQUID.
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