2017 年 137 巻 7 号 p. 380-385
A nanoprobe measurement system that enables seamless probe-movement from millimeter to nanometer scale was developed for the measurements of nanostructured materials. A scheme for the detection of probe contacting to the sample surface was established. The travels of piezo positioners in coarse and fine modes were calibrated using a standard sample. The imaging of current path in an Fe nanoparticulate film was demonstrated by using the developed system.
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