We have been studying on measuring capacitance and potential using long distance electrode for estimating a permittivity distribution. The estimating method of permittivity distribution was proposed using Finite Element Method (FEM) and Genetic Algorithm (GA). However, the measurement accuracy was not reviewed. In this paper, we carried out numerical analysis using FEM in case of change of diameter, position and permittivity of a rod of dielectric and discussed the measurement accuracy of capacitance and potential.
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