球電極間の低電圧衝突ESDに伴う過渡電界の光電界プローブによる測定波形からみた放電特性の充電電圧依存性

抄録

Measurements of transient electric fields due to collision electrostatic discharges (ESDs) between charged spherical electrodes with a diameter of 30 mm were conducted at charge voltages from 300 V to 600 V with an optical electric field probe. The result reveals that the corrected measurement waveforms properly provide electrostatic field levels at a distance of over 25 mm away from the discharge point. It also shows that the radiated electric field peaks increase with charging voltages, which is the opposite result to the well-known findings obtained so far for the lower voltage ESD events.