An Overview on the Sensitivity of Electro-Acoustic-Reflectometry (EAR) Method

抄録

This article is an overview on the sensitivity of the recently introduced EAR method for the measurement of space charge in thin dielectric films. Its principle is first recalled then an investigation of its sensitivity is made. It is shown that when the bandwidth of the network analyzer is 10 Hz, a signal-to-noise ratio above 50 is obtained even with an excitation as low as -50 dBm.