球電極間の衝突ESDにおけるベアチップの光電界センサーを用いた静電界の過渡応答

抄録

Transient electric fields due to collision electrostatic discharges (ESDs) between charged spherical electrodes with a diameter of 30 mm at a charging voltage from 600 V are measured in the close proximity to the spark point by using a bare-chip optical electric field sensor. The transient responses of the electrostatic fields at distances of over 6 mm away from the spark point are also shown.