垂直静電塗布法を用いた有機半導体薄膜の均質化

抄録

The electrospray deposition (ESD) method is simple solution process used solution spray formed by electric field between the solution and conductive substrate or insulated electrode. In this study, we fabricated thin films based on 6,13-bis (triisopropyl-silylethynyl) pentacene formed by ESD method. An electric field applied between the nozzle and selected patterned electrodes on the substrate. Moreover, a new droplet size selected vertical ESD method has been proposed. This vertical ESD method allows selecting droplet size by weight itself using this system with horizontal injection on a vertical substrate. We fabricated OFET using this method and measured static electrical characteristics. These results demonstrate that the solution on the selected droplet size by the position of substrate set on vertical.