電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
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Glass buffer-layerを有するSi基板上へのNd-Fe-B系厚膜磁石の作製と諸特性
中野 正基桃崎 瑞貴松岡 凌平山下 昂洋柳井 武志福永 博俊
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2021 年 141 巻 2 号 p. 128-132

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This contribution reports mechanical characteristic together with magnetic properties of PLD (Pulsed Laser Deposition)-fabricated isotropic Nd-Fe-B thick-films on Si substrates with each glass under layer. An enhancement in the thickness of a PLD-made glass buffer-layer enabled us to reduce the stress between a Si substrate and a film magnet. Moreover, the adoption of a glass buffer-layer was effective to enhance the values of residual magnetic polarization and (BH)max comparing those of a Nd-Fe-B film magnet with almost the same thickness on a Si substrate with a 500-nm thick thermal oxide layer.

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