Co-Zr-Nb膜の配置による平行2導体MSL間の誘導減結合

抄録

The effect of the negative permeability of the magnetic film on the inductive coupling was quantitatively investigated using a magnetic circuit analysis of two parallel microstrip line (MSLs) with a Co-Zr-Nb film. First, an electromagnetic field simulation was performed to obtain the magnetic flux distribution around the MSLs with the Co-Zr-Nb film. A simple magnetic circuit model considering the negative permeability, based on the simulated magnetic flux distribution, was constructed. The self-inductance of the MSL and the mutual inductance between the MSLs were estimated. Finally, the coupling coefficient of magnetic flux was obtained using the self and the mutual inductances. As a result, it was shown that the inductive coupling could be reduced to almost zero in the certain frequency range above the FMR frequency caused by the negative permeability of the magnetic film. This result indicates the possibility of developing the design guideline of the magnetic films as the crosstalk suppressors.