Characterization of the VO_x Thin Films Grown on C-plane Sapphire Substrates by MOD

Abstract

Vanadium oxide (VO_x) thin films were grown on c-plane sapphire substrates by metal-organic decomposition (MOD). Their crystallinity and optical characteristics were evaluated by XRD, XPS, AFM, LSM and a spectrophotometer. The crystallinity of the VO_x thin films were improved in adjusting the O reduction by controlling the firing time in N₂ atmosphere and a spin coating rotation speed. As a result, in the optimized VO_x samples under a firing temperature of 580°C after calcining at 300°C with 6000 rpm coating speed, the growth of polycrystalline fine nanoparticles of a single composition was confirmed which has good thermochromic characteristics.