誘導結合磁化プラズマ中の共鳴磁界域近傍部分共鳴による電子エネルギー利得の評価指標

抄録

A measure for analyzing electron energy gain is introduced to seek for desirable conditions for the partial resonance that assists the power deposition to radio-frequency (rf) plasmas driven under confronting divergent magnetic fields. The weight of the solid angle of initial electron release from a source and the effect of electron-molecule collisions are considered in the integration of the expected value of the electron energy.