PEA法を用いた高温・高位置分解能空間電荷分布測定装置の開発

抄録

The PEA (Pulsed electro-acoustic) method is one of measurement techniques for space charge distributions in insulating materials, and we have improved the positional resolution of high temperature measurement. In the improvement, a thin acoustic sensor of P(VDF-TrFE) film was made using a spin coating method, and a piezoelectricity was given to it by poling procedure. Using this thin sensor, it is found that the space charge distribution was measured with a positional resolution of about 5 µm at 80℃.