電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
論文
大気圧アルゴンプラズマジェットI
-可視域発光スペクトルと真空紫外光の空間分布測定-
鈴木 進寺西 研二伊藤 晴雄
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2023 年 143 巻 12 号 p. 366-373

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This paper describes the observed position dependent emission spectrum and vacuum ultraviolet (VUV) to clarify the optical structure of argon atmospheric pressure plasma jets (APJs). Visible emission spectra of argon, nitrogen and OH molecules were measured as a function of position from the nozzle of plasma jet generator to gas flow direction. From the results, we realized that a certain electric field is required for producing high energy excited atoms of argon in the jet from the high voltage electrode in the device to the ground positioned at downstream side. Moreover, VUV was detected along the plasma jet through the downstream direction. Thus, we could picture that the light pattern of plasma jet of which intensity weaken depend to the distance from the nozzle is sustained by the above two factors with the present steady state experiments.

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