Calibration of the DC Resistance from 10MΩ to 10TΩ with Dual Source Bridge Type High Precision High Resistance Measuring Instrument

Abstract

We investigated a measurement method using a dual source bridge type high-precision high-resistance measuring instrument ranging from 10MΩ to 10TΩ. All possible uncertainty components of the instrument were evaluated and its measurement uncertainty for each resistance range was estimated and the details are argued in the manuscript. We performed the verification of the instrument by performing a precise comparison with the national high-resistance bridge maintained by NMIJ/AIST, and it showed good agreement with its uncertainty.