複数のAD変換器を用いた全ディジタル位相検出型QCMの周波数精度向上に関する検討

抄録

In this paper, we propose a method to further improve the frequency measurement accuracy of the phase-detection QCM, which is superior to conventional QCMs in terms of time resolution and frequency resolution. Since the measurement accuracy of the phase-detection QCM is limited by the ENOB of the AD converter used, we have shown that it is possible to improve the ENOB by parallelizing multiple AD converters, and thus actually improve the frequency measurement accuracy.