Verification of Collision Mechanism from the Electron Energy Distributions in a Glow Discharge

The transactions of the Institute of Electrical Engineers of Japan.A

Online ISSN : 1347-5533
Print ISSN : 0385-4205

Verification of Collision Mechanism from the Electron Energy Distributions in a Glow Discharge

Yoshio Saito, Akira Nishitsuji, Yuji Matsuura, Takeshi Sakaguchi, Toshiyuki Hokodate

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1988 Volume 108 Issue 1 Pages 31-38

DOI https://doi.org/10.1541/ieejfms1972.108.31

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