IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Polycrystalline-Silicon Thin Film Transistor by Thermal Annealing
Nobutake KonishiKenji Miyata
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Keywords: TFT, LPCVD
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1990 Volume 110 Issue 10 Pages 670-674

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© The Institute of Electrical Engineers of Japan
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