電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
ポリ-2-クロローパラキシリレン/ポリパラキシリレンの複合薄膜の高電界電導
森 竜雄水谷 照吉
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1990 年 110 巻 12 号 p. 888-893

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The high-field currents in poly-p-xylylene (PPX) and poly-2-chloro-p-xylylene (PCPX) thin films are due to hole injection from anode metal and collision ionization. PPX thin films showed the negative temperature dependence of high-field currents. Since the introduction of chlorine atoms in PCPX thin films increases the carrier scattering, high-field currents in PCPX thin films are suppressed in the low temperature region.
This paper discussed the high-field currents of PCPX/PPX composite thin films which are PCPX thin films (d _??_ 150nm) deposited on PPX thin films (d _??_ 200nm). They were strongly suppressed at room temperature, but not in the low temperature. Therefore, PCPX/PPX composite thin films showed a remarkable negative temperature dependence of high-field currents. High-field currents were more suppressed in PCPX (60nm)/PPX (230nm) composite thin film than in PCPX (130nm)/PPX (230nm). This can be explained by the suppression of hole injection from anode by homo space charge at the interface between PCPX and PPX.

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