Abstract
A self-consistent modelling and simulation technique of rf non-equilibrium plasmas using a Monte Carlo method is presented. In the model, the kinetics of electrons and ions is calculated by a Monte Carlo method which enables us to incorporate the non-equilibrium effect of electron energy distribution against the electric field. This effect may be important under the condition that the product of the gas pressure and the gap length is small and/or the electric field changes rapidly, as commonly seen with rf non-equilibrium plasmas. The electric field in plasma is self-consistently determined by solving Poisson's equation. The technique is applied torf plasmas in Ar gas and the results suggest that the present model can adequately simulate rf plasmas.