局所的平衡場におけるグロー放電の陰極シース内の電界

抄録

The present study is concerned with obtaining a spatial distribution of the electric field in the cathode sheath of a glow discharge by solving the Possion equation, which is based on local equilibrium behavior of the charged particle swarm. At this time, a boundary condition which the electric field and its gradient at the sheath edge are zero together, is used. This means that at the sheath edge the electron density equals to the positive ion density, thereby the cathode sheath is smoothly connected with the negative glow plasma.
Consequently, the spatial distribution of the electric field obtained is thought to be closer to the actual state compared with the classical solutions. Moreover the linearly decreasing electric field appears only extremely near the cathode in a range of particularly smaller discharge current. Since this linear distribution is sometimes available, its theoretical expression is also derived.