Measurements of Electron Energy Distribution Function in RF Discharge Plasmas by Using Improved Driven Probe Method

Atsushi Ohsawa; Mikio Ohuchi; Tadahiro Kubota

doi:10.1541/ieejfms1990.112.12_1015

Atsushi Ohsawa, Mikio Ohuchi, Tadahiro Kubota

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JOURNAL FREE ACCESS

1992 Volume 112 Issue 12 Pages 1015-1019

DOI https://doi.org/10.1541/ieejfms1990.112.12_1015

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Published: December 20, 1992 Received: October 22, 1991 Available on J-STAGE: July 15, 2008 Accepted: - Advance online publication: - Revised: -
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Date of correction: July 15, 2008 Reason for correction: - Correction: ABSTRACT Details: Wrong : Electron energy distribution functions (EEDF) in argon RF plasmas have been measured by using an improved driven probe. The presence of RF potential fluctuations between probe and plasma distorts a Langmuir probe characteristic. Therefore it introduces large errors into plasma parameters. The improved method, which removes the effect of the RF fluctuation on probe characteristics, consists of superimposing the fluctuation of the space potential measured by an emissive probe to the dc voltage applied to the probe. It offered an efficient improvement of probe characteristics. This technique was applied to the measurements of EEDFs in argon plasmas at 13.56MHz. The measured EEDFs in the RF plasmas were non-Maxwellian. It was found that the high energy
electrons present in the vicinity of the boundary between the powered electrode sheath and plasma. The electrons will play an important role to maintain the RF discharges.
Right : Electron energy distribution functions (EEDF) in argon RF plasmas have been measured by using an improved driven probe. The presence of RF potential fluctuations between probe and plasma distorts a Langmuir probe characteristic. Therefore it introduces large errors into plasma parameters. The improved method, which removes the effect of the RF fluctuation on probe characteristics, consists of superimposing the fluctuation of the space potential measured by an emissive probe to the dc voltage applied to the probe. It offered an efficient improvement of probe characteristics. This technique was applied to the measurements of EEDFs in argon plasmas at 13.56MHz. The measured EEDFs in the RF plasmas were non-Maxwellian. It was found that the high energy electrons present in the vicinity of the boundary between the powered electrode sheath and plasma. The electrons will play an important role to maintain the RF discharges.

Date of correction: July 15, 2008 Reason for correction: - Correction: PDF FILE Details: -

Abstract

Electron energy distribution functions (EEDF) in argon RF plasmas have been measured by using an improved driven probe. The presence of RF potential fluctuations between probe and plasma distorts a Langmuir probe characteristic. Therefore it introduces large errors into plasma parameters. The improved method, which removes the effect of the RF fluctuation on probe characteristics, consists of superimposing the fluctuation of the space potential measured by an emissive probe to the dc voltage applied to the probe. It offered an efficient improvement of probe characteristics. This technique was applied to the measurements of EEDFs in argon plasmas at 13.56MHz. The measured EEDFs in the RF plasmas were non-Maxwellian. It was found that the high energy electrons present in the vicinity of the boundary between the powered electrode sheath and plasma. The electrons will play an important role to maintain the RF discharges.

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