IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Introduction to the Study of Micromachines
How to Begin the Research on Micro Electro Mechanical Systems I. Subjects of Study on Micromachines
Hiroyuki Fujita
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1992 Volume 112 Issue 12 Pages 958-961

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