Abstract
We describe a new method for measuring the mechanical properties of micro mechanical structures by using a force microscope. A high resolution scanning force microscope (SFM) system using a laser heterodyne interferometory was developed. The interaction between the SFM probe and the sample was investigated under the condition that the sample was so thin as to be deflected by the interaction force. The SiO2 micro cantilevers were fabricated by the lithographic process and the spring constants were determined from the SFM force curves. The measured spring constant was used to obtain the Young's modulus of the material. Moreover, the Young's modulus of thin aluminium film coated on the cantilever was obtained by this method. This method is simple and applicable to the evaluation of elasticity for the micro mechanical structures.
