抄録
New concept of electrostatic microactuator is proposed. It consists of many distfibuted driving units. Each driving unit has two wave-like electrodes which are insulated and pulled each other by electrostatic force. As the driving units have narrow gap portions, the strong electrostatic force enough to deform is obtained. When voltage is applied between the electrodes, the microactuator shrinks by the electrostatic force. We simulated the behavior of the actuator using FEM analysis, and a macro model actuator was fabricated. Its behavior was nearly equal to the result of a simulation.
