An Adaptive Charge Simulation Method for Electron Optical Analysis

Hiroshi Hiroshima

doi:10.1541/ieejfms1990.112.2_99

Hiroshi Hiroshima

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JOURNAL FREE ACCESS

1992 Volume 112 Issue 2 Pages 99-105

DOI https://doi.org/10.1541/ieejfms1990.112.2_99

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Published: February 20, 1992 Received: August 26, 1991 Available on J-STAGE: July 15, 2008 Accepted: - Advance online publication: - Revised: -
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Date of correction: July 15, 2008 Reason for correction: - Correction: DTRECEIVED Details: Wrong : 19910325
Right : 19910826

Date of correction: July 15, 2008 Reason for correction: - Correction: ABSTRACT Details: Wrong : In the analysis of rotationally symmetrical electron optics, it has been a difficult problem to
calculate electric potential of the region including a field electron or ion emitter because of an extreme difference in the magnitude of electrode geometry. For such a calculation, the charge simulation method is regarded as more suitable than the finite-difference method or the finiteelement method. However, great skill has been needed in arrangement of charges in order to obtain more accurate solution by using this method. Here, we propose a method named deflation method, which generates reasonable arrangement of charges. By the combination of the deflation method and the assignment method commonly used, an adaptive charge simulation method program is developed. Numerical calculations are carried out for an electrostatic uni-potential lens with
various computation errors so that we can determine the appropriate parameters giving the arrangement of charges. Usefulness of this program is shown for a diode structure which involves a field emitter with an apex radius of 0.1μm.
Right : In the analysis of rotationally symmetrical electron optics, it has been a difficult problem to calculate electric potential of the region including a field electron or ion emitter because of an extreme difference in the magnitude of electrode geometry. For such a calculation, the charge simulation method is regarded as more suitable than the finite-difference method or the finiteelement method. However, great skill has been needed in arrangement of charges in order to obtain more accurate solution by using this method. Here, we propose a method named deflation method, which generates reasonable arrangement of charges. By the combination of the deflation method and the assignment method commonly used, an adaptive charge simulation method program is developed. Numerical calculations are carried out for an electrostatic uni-potential lens with various computation errors so that we can determine the appropriate parameters giving the arrangement of charges. Usefulness of this program is shown for a diode structure which involves a field emitter with an apex radius of 0.1μm.

Date of correction: July 15, 2008 Reason for correction: - Correction: PDF FILE Details: -

Abstract

In the analysis of rotationally symmetrical electron optics, it has been a difficult problem to calculate electric potential of the region including a field electron or ion emitter because of an extreme difference in the magnitude of electrode geometry. For such a calculation, the charge simulation method is regarded as more suitable than the finite-difference method or the finiteelement method. However, great skill has been needed in arrangement of charges in order to obtain more accurate solution by using this method. Here, we propose a method named deflation method, which generates reasonable arrangement of charges. By the combination of the deflation method and the assignment method commonly used, an adaptive charge simulation method program is developed. Numerical calculations are carried out for an electrostatic uni-potential lens with various computation errors so that we can determine the appropriate parameters giving the arrangement of charges. Usefulness of this program is shown for a diode structure which involves a field emitter with an apex radius of 0.1μm.

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