アドミタンス法によるグロー放電陽光柱内の電子エネルギー分布関数の測定

抄録

There are several methods based on the Druyvesteyn's probe theory to measure the electron energy distribution function (EEDF) in the positive column of the glow discharge, for example the second harmonic method (2ω) and the amplitude modulation method (AM). We propose the admittance method (dY) to measure EEDF and compare dY with 2ω and AM.
The calculated electron swarm parameters from measuring EEDF by using dY and 2ω, for example, mean energy of electrons, mean free pass, diffusion coefficient, mobility and drift velocity of electrons, approximately agreed with the parameters which were obtained by solving Boltzmann equation in He glow discharges. The admittance method is superior to other methods to simplify measuring circuits and to increase the accuracy of measurement.