A high acceleration linear motor has been developed, which would be applied for semiconductor manufacturing equipments and precise machining systems. The linear motor has the more precise positioning and higher acceleration than conventinal. High energy Nd-Fe-B sintered magnet was used for magnetic circuit which had been simulated with FEM (TOSCA) to achieve 150 N of the maximum driving force. The control unit is comprised of a control circuit using a digital PID filter and an encorder. The tracing and positioning errors were able to be controlled within ±10μm and±2μm, respectively. The highest acceleration of 50m/s2(-5G) were obtained with the positioning error of ±2μm.
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