抄録
The effect of mixed nitrogen on ozone synthesis in low pressure oxygen was investigated. The electrodeless discharge system was used in pressure range from 400 to 930Pa for glow discharge. As a result, the ozone yield efficiency had peak value at 50% nitrogen and oxygen mixture in low pressure. The parallel plate electrode system was used in higher pressure range (665-101kPa) for silent discharge. The yield efficiency of ozone decreased with increasing mixture rate of nitrogen and furthermore the yield efficiency had peak value in lower pressure than 6650Pa.
In order to clear the cause of above results, plasma parameters (electron temperature, electron density) in discharge space were measured. The ozone yield increased in proportion to the electron temperature and electron density. However, these electron temperature and electron density did not show remarkable dependence of nitrogen mixture rate. Furthermore, in order to investigate the influence of the luminosity of discharges on the effect of mixed nitrogen, the ozone yield efficiency was measured mixing oxygen and argon. It was clear that the peak characteristic of ozone yield efficiency was not depend on the luminosity of discharges.
As a result, in case of oxygen as a raw material, the ozone yield is small. On the other hand, in case of nitrogen mixture gas, many oxygen atoms are consumed by NO and NOx and the resolving reaction is controlled. In short, nitrogen controls the resolution of synthesized ozone.
