電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
レーザアブレーション法による有機薄膜形成
藤井 健雄井上 真吾島 浩基松本 尚能神成 文彦
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1996 年 116 巻 1 号 p. 42-49

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Experimental studies of the fabrications of polymer and non-polymer organic thin films by laser ablation are discussed. We succeeded in fabrication of crystalline thin films of polytetrafluoroethylene (PTFE) by F2 laser (157nm) ablation. As an example of the application of the PTFE thin film, we fabricated PTFE thin films containing semiconductor CdTe microcrystallites, which show a 3rd-order optical nonlinearity. Non-polymer organic thin films fabricated by KrF laser (248nm) ablation, such as copper-phthalocyanine (CuPc) and 4-dialkylamino-4'-nitrostilbene (DANS), also showed crystallinity and little change in their composition when reducing the laser ablation fluence close to the ablation threshold fluence of -20mJ/cm2.
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