IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Production of S2F10, S2OF10, and S2O2F10 from Spark and Negative-Corona Discharges in SF6 and SF6/O2 Gas Mixtures
Richard J. Van BruntJames K. OlthoffSamara L. FirebaughIsidor Sauers
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1996 Volume 116 Issue 11 Pages 1014-1024

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Abstract

The rates for production of the compounds S2F10, S2OF10, and S2O2F10 have been measured both in spark and continuous, constant-current negative glow corona discharges generated using point-to-plane electrode gaps in 'pure'SF6 and SF6/O2 gas mixtures containing up to 10% oxygen by volume fraction. In the case of corona discharges in pure SF6, the S2F10 concentrations were measured as a function of time during discharge operation using a gas chromatograph-mass spectrometer for gas pressures in the range of 100kPa to 500kPa and at discharge currents between 2μA and 80μA. The charge rate-of-production of S2F10 from negative corona is observed to drop with decreasing discharge current, and the yield curves exhibit nonlinearities in the early stages of the discharge associated with "conditioning" of the point electrode. The initial nonlinearities become more pronounced with increasing gas pressure. The absolute yields of S2OF10 and S2O2F10 were measured as a function of O2 content in SF6 for both negative glow corona (40μA and 200kPa) and spark discharge (80J/spark and 100kPa). The gas analysis in the case of spark discharges was performed after each spark using a cryogenic enrichment chromatographic technique. When O2 is added to the gas, there is a dramatic drop in the S2F10 yield from both types of discharges with a corresponding increase in S2OF10 yield from the spark and S2O2F10 yield from the corona discharge. The results can be explained within the framework of a plasma-chemical model from considerations of the competition among the reactions of SF5 radicals produced by dissociation of SF6 in the discharge with SF5 itself as well as with O2 and O, and the relative degree of O2 dissociation in the two types of discharges.

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