An arc free KrF excimer laser was developed. Firstly, the formation process of an arc discharge in the KrF excimer laser was studied. By observing the waveforms of the charging capacitor voltage, the arc was found to be generated by the residual charge after the laser oscillation. In order to reduce the residual charge of the charging capacitor, a diode was connected in parallel. As a result, arc discharges in the KrF excimer laser were eliminated. Secondly, lifetime tests of the KrF excimer laser with this diode circuit were carried out. The results showed good improvement, such as 1.5×108 pulses for the gas life, 2×109 pulses for the window life, and 5×109 pulses for the electrode life.
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