High Density Ozone Generation by Silent Discharge under extremely short gap length around 100μm

Abstract

A novel type of ozone generator has been developed. In the apparatus, an extremely short gap length around 0.1mm can be constructed with a high precision. Setting the gap length to be shorter, the gas temperature in the discharge gap can be limited to be sufficiently low, moreover the dissociation rate of produced ozone by electron impacts is thought to be limited to be low. In the gap length of 0.1mm, the ozone concentration as high as 305g/Nm³ is obtained under a high power density of 1W/cm² and the temperature of a cooling water of 15°C.