電気学会論文誌A(基礎・材料・共通部門誌)
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
CF4を含む混合ガスの電子輸送特性
伊藤 秀範猪股 まどか松村 俊明佐藤 孝紀鈴木 好夫中尾 好隆田頭 博昭
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1996 年 116 巻 4 号 p. 328-333

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The electron swarm characteristics in gas mixtures containing CF4 has been analysed over the E/N range 0.01-566Td by a multi-term Boltzmann equation method and by a Monte Carlo simulation. The differences between CF4 and Ar, and CF4 and N2 mixtures, in electron transport coefficients have been explained by the calculated electron energy distributions and the respective sets of electron collision cross-sections. The synergistic behaviour and the dielectric characteristics in these gas mixtures have been also shown and discussed in detail.
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