開口遮蔽板を用いたオフ•アクシス•パルスレーザ•デポジション法

抄録

A new off-axis pulsed laser deposition method using a perforated plate is developed in order to deposit droplet-free Ta₂O₅ thin films. The droplet density of on-axis films is large at the center of the film. But that of off-axis films is small and the distribution of the density is independent of the position on the substrate. These results indicate that the perforated screening plate plays an important role of limiting the path of droplets. On the other hand the deposition rate is not diminished because the species are not trapped to the plate. The optimum oxygen pressure for depositing the droplet-free Ta₂O₅ films is from 200 to 300 mTorr at which the ratio between the increasing rate of droplets and that of film thickness becomes minimum.