A Boltzmann Equation Analysis of Electron Swarm Parameters and Properties of Excited Particle Number Densities in Xe/Ne Plasmas -Laser Absorption Effect-

Satoshi Uchida; Hirotake Sugawara; Peter L.G. Ventzek; Yosuke Sakai

doi:10.1541/ieejfms1990.118.6_622

Satoshi Uchida, Hirotake Sugawara, Peter L.G. Ventzek, Yosuke Sakai

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JOURNAL FREE ACCESS

1998 Volume 118 Issue 6 Pages 622-628

DOI https://doi.org/10.1541/ieejfms1990.118.6_622

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Published: June 01, 1998 Received: December 26, 1997 Available on J-STAGE: July 15, 2008 Accepted: - Advance online publication: - Revised: -
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Date of correction: July 15, 2008 Reason for correction: - Correction: DTRECEIVED Details: Wrong : 19971002
Right : 19971226

Date of correction: July 15, 2008 Reason for correction: - Correction: ABSTRACT Details: Wrong : Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle
properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.
Right : Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.

Date of correction: July 15, 2008 Reason for correction: - Correction: AUTHOR Details: [in Japanese]

Date of correction: July 15, 2008 Reason for correction: - Correction: PDF FILE Details: -

Abstract

Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.

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