A Boltzmann Equation Analysis of Electron Swarm Parameters and Properties of Excited Particle Number Densities in Xe/Ne Plasmas -Laser Absorption Effect-

Satoshi Uchida; Hirotake Sugawara; Peter L.G. Ventzek; Yosuke Sakai

doi:10.1541/ieejfms1990.118.6_622

Xe/Neプラズマ中電子輸送係数ならびに励起粒子数密度特性のボルツマン方程式解析ーレーザ光吸収効果-

内田諭, 菅原広剛, Peter L.G. Ventzek, 酒井洋輔

著者情報

キーワード: 励起粒子, Xe/Ne混合ガス, ボルツマン方程式解析, レーザ光吸収効果

ジャーナルフリー

1998 年 118 巻 6 号 p. 622-628

DOI https://doi.org/10.1541/ieejfms1990.118.6_622

詳細

発行日: 1998/06/01 受付日: 1997/12/26 J-STAGE公開日: 2008/07/15 受理日: - 早期公開日: - 改訂日: -
訂正情報
訂正日: 2008/07/15 訂正理由: - 訂正箇所: 論文受付日訂正内容: 訂正前 : 19971002
訂正後 : 19971226

訂正日: 2008/07/15 訂正理由: - 訂正箇所: 論文抄録訂正内容: Wrong : Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle
properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.
Right : Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.

訂正日: 2008/07/15 訂正理由: - 訂正箇所: 著者情報訂正内容: 訂正前 : 内田諭¹⁾, 原広剛¹⁾, 酒井洋輔¹⁾
訂正後 : 内田諭¹⁾, 菅原広剛¹⁾, 酒井洋輔¹⁾

訂正日: 2008/07/15 訂正理由: - 訂正箇所: PDFファイル訂正内容: -

抄録

Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.

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訂正情報

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